Air damping of atomically thin MoS2 nanomechanical resonators

被引：61
作者：
Lee, Jaesung [1 ]
Wang, Zenghui [1 ]
He, Keliang [2 ]
Shan, Jie [2 ]
Feng, Philip X. -L. [1 ]
机构：
[1] Case Western Reserve Univ, Case Sch Engn, Dept Elect Engn & Comp Sci, Cleveland, OH 44106 USA
[2] Case Western Reserve Univ, Coll Arts & Sci, Dept Phys, Cleveland, OH 44106 USA
来源：
APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 02期
基金：
美国国家科学基金会;
关键词：
GRAPHENE SHEETS; FREQUENCY;
D O I：
10.1063/1.4890387
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on experimental measurement of air damping effects in high frequency nanomembrane resonators made of atomically thin molybdenum disulfide (MoS2) drumhead structures. Circular MoS2 nanomembranes with thickness of monolayer, few-layer, and multi-layer up to similar to 70 nm (similar to 100 layers) exhibit intriguing pressure dependence of resonance characteristics. In completely covered drumheads, where there is no immediate equilibrium between the drum cavity and environment, resonance frequencies and quality (Q) factors strongly depend on environmental pressure due to bulging of the nanomembranes. In incompletely covered drumheads, strong frequency shifts due to compressing-cavity stiffening occur above similar to 200 Torr. The pressure-dependent Q factors are limited by free molecule flow (FMF) damping, and all the mono-, bi-, and tri-layer devices exhibit lower FMF damping than thicker, conventional devices do. (C) 2014 AIP Publishing LLC.
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页数：5
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