Effects of aspect ratio of lead zirconate titanate on 1-3 piezoelectric composite properties

被引：12
|
作者：
Hirata, Y
Numazawa, T
Takada, H
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 9B期
关键词：
1-3; piezocomposites; PZT; SR lithography; aspect ratio; electromechanical coupling coefficient; piezoelectric coefficient; FEM;
D O I：
10.1143/JJAP.36.6062
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An array of lead zirconate titanate (PZT) rods whose cross section is 25 mu m square was fabricated using synchrotron radiation (SR) lithography, and the effects of the aspect ratio (height/width) of the PZT rod on 1-3 piezoelectric composite properties were studied. The aspect ratio was between 3 and 9. Mechanical quality factor and acoustic impedance were found to depend weakly on the aspect ratio. However, electromechanical coupling coefficients were found to increase as the aspect ratio increased. Based on the result of deformation simulation by the finite element method (FEM), this dependence was found to be caused by the increase in piezoelectric coefficients as the aspect ratio increased.
引用
收藏
页码：6062 / 6064
页数：3
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