Determination of the Impurity Level of High-Purity Arsine by Chromatography-Mass-Spectrometry

被引:1
作者
Sozin, A. Yu. [1 ]
Sorochkina, T. G. [1 ]
Chernova, O. Yu. [1 ]
Kotkov, A. P. [2 ]
Grishnova, N. D. [2 ]
Polezhaev, D. M. [2 ]
Pushkarev, G. V. [2 ]
Ermolaev, S. V. [2 ]
机构
[1] Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Nizhnii Novgorod 603950, Russia
[2] AO NPP Salyut, Nizhnii Novgorod 603950, Russia
关键词
arsine; gas chromatography– mass-spectrometry; impurity; limit of detection; accuracy; IONIZATION CROSS-SECTIONS;
D O I
10.1134/S1061934821030138
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The impurity composition of arsine is studied by gas chromatography-mass-spectrometry. Impu-rities of permanent gases; carbon dioxide; hydrides; saturated, unsaturated, and aromatic hydrocarbons C-1-C-6; halogenated hydrocarbons; sulfur compounds; and arsine and diarsine alkyl derivatives are determined. The impurity level of high-purity arsine is 10(-6)-10(-5) vol %. Impurity concentrations in arsine after synthesis and in the fractions extracted in the course of its rectification are rather high and lie in the range 10(-6)-0.1 vol %. The limits of detection for impurities are 2 x 10(-7)-2 x 10(-4) vol %.
引用
收藏
页码:347 / 354
页数:8
相关论文
共 29 条
  • [1] Beran J.A., 1959, J PHYS CHEM-US, V73, P3866, DOI [10.1021/j100845a050, DOI 10.1021/J100845A050]
  • [2] Berezkin VG, 2000, DOKL PHYS CHEM, V374, P172
  • [3] Semiconductor photoelectric converters for the ultraviolet region of the spectrum
    Blank, TV
    Gol'dberg, YA
    [J]. SEMICONDUCTORS, 2003, 37 (09) : 999 - 1030
  • [4] Single-crystalline GaAs, AlGaAs, and InGaAs layers grown by metalorganic VPE on porous GaAs substrates
    Buzynin, YN
    Gusev, SA
    Danil'tsev, VM
    Drozdov, MN
    Drozdov, YN
    Murel', AV
    Khrykin, OI
    Shashkin, VI
    [J]. TECHNICAL PHYSICS LETTERS, 2000, 26 (04) : 298 - 301
  • [5] Chernyaev V.N, 1974, TECHNOLOGY GALLIUM A
  • [6] Churbanov M.F., 2018, HIGH-PURITY SUBST+
  • [7] Devyatykh G.G, 1974, VOLATILE INORGANIC H
  • [8] Devyatykh G.G., 1974, PREPARATION ANAL HIG, P15
  • [9] Devyatykh G.G, 1962, T KHIM KHIM TEKHNOL, P221
  • [10] Devyatykh G. G., 2003, EXHIBITION COLLECTIO