Manufacturing of isolated ceramic microstructures

被引：12

作者：

Gietzelt, T ^{[1
]}

Piotter, V ^{[1
]}

Ruprecht, R ^{[1
]}

Hausselt, J ^{[1
]}

机构：

[1] Forschungszentrum Karlsruhe, Inst Mat Forsch 3, D-76021 Karlsruhe, Germany

来源：

MICROSYSTEM TECHNOLOGIES | 2002年 / 9卷 / 1-2期

关键词：

Alumina - Binders - Ceramic materials - Injection molding - Mathematical models - Molds - Nitric acid - Optimization - Polymethyl methacrylates - Scanning electron microscopy - Sintering - Zirconia;

D O I：

10.1007/s00542-002-0208-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design of a micromold for gearwheels and components for a gearwheel micropump were adapted for the fabrication by micro powder injection molding (micro-PIM). Several variations were made to compensate the shrinkage during sintering and to meet the dimensions of the micro features. Mold inserts made by the LIGA- and the UV-LIGA-Process were used. The quality of the models was evaluated by SEM and tests of micro injection molding in PMMA. Subsequently, micro-PIM was carried out using different feedstocks. The green microparts were isolated from the substrate, debound and sintered. At sintered parts, the roughness of the surface was evaluated and the processes were optimized.

引用

页码：99 / 103

页数：5