Electrical properties of ultra thin tin oxide films

被引：0
|
作者：
Matsui, Y [1 ]
Goto, Y [1 ]
机构：
[1] Asahi Glass Co Ltd, New Prod Dev Ctr, Fabricated Glass Gen Div, Tsurumi Ku, Yokohama, Kanagawa 230, Japan
来源：
FLAT-PANEL DISPLAYS AND SENSORS: PRINCIPLES, MATERIALS AND PROCESSES | 2000年 / 558卷
关键词：
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
Tin Oxide transparent conductive oxide(TCO) films of less than 20nm in thickness was developed as a substrate for pen touch screens. The films were deposited using APCVD method by hydrolytic decomposition of stannic chloride. Electrical properties and stability to heat treatment were studied in relation to deposition conditions. We found the both properties depends mainly on fluorine concentration in the films. The stability was much improved at reduced fluorine concentration. The film which showed the stability to heat treatment at 600 degrees C heat treatment was attained at the thickness of 20nm.
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页码：393 / 398
页数：4
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