Wavelength-tunable microbolometers with metamaterial absorbers

被引:189
作者
Maier, Thomas [1 ]
Brueckl, Hubert [1 ]
机构
[1] AIT Austrian Inst Technol GmbH, A-1220 Vienna, Austria
关键词
D O I
10.1364/OL.34.003012
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Microbolometers are modified by metallic resonant absorber elements, leading to an enhanced responsivity at selectable wavelengths. The dissipative energy absorption of tailored metamaterials allows for engineering the response of conventional bolometer microbridges. The absorption peak position and height are determined by the geometry of the metamaterial. Square-shaped metal/dielectric/metal stacks as absorber elements show spectral resonances at wavelengths between 4.8 and 7.0 mu m in accordance with numerical simulations. Total peak absorptions of 0.8 are obtained. The metamaterial modified bolometers are suitable for multispectral thermal imaging systems in the mid-IR and terahertz regime. (C) 2009 Optical Society of America
引用
收藏
页码:3012 / 3014
页数:3
相关论文
共 10 条
[1]   Monolithic two-dimensional arrays of micromachined microstructures for infrared applications [J].
Cole, BE ;
Higashi, RE ;
Wood, RA .
PROCEEDINGS OF THE IEEE, 1998, 86 (08) :1679-1686
[2]   Experimental verification of an optical negative-index material [J].
Drachev, VP ;
Cai, W ;
Chettiar, U ;
Yuan, HK ;
Sarychev, AK ;
Kildishev, AV ;
Klimeck, G ;
Shalaev, VM .
LASER PHYSICS LETTERS, 2006, 3 (01) :49-55
[3]   Antenna-coupled infrared focal plane array [J].
González, FJ ;
Porter, JL ;
Boreman, GD .
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2006, 48 (01) :165-166
[4]   PROPERTIES OF PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITED A-SINX-H BY VARIOUS DILUTION GASES [J].
HSIEH, SW ;
CHANG, CY ;
LEE, YS ;
LIN, CW ;
HSU, SC .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (06) :3645-3655
[5]  
KLANJSEK M, 2001, PHYS STATUS SOLIDI A, V183, P439
[6]   OPTICAL-PROPERTIES OF THE METALS AL, CO, CU, AU, FE, PB, NI, PD, PT, AG, TI, AND W IN THE INFRARED AND FAR INFRARED [J].
ORDAL, MA ;
LONG, LL ;
BELL, RJ ;
BELL, SE ;
BELL, RR ;
ALEXANDER, RW ;
WARD, CA .
APPLIED OPTICS, 1983, 22 (07) :1099-1119
[7]   A Microbolometer Asynchronous Dynamic Vision Sensor for LWIR [J].
Posch, Christoph ;
Matolin, Daniel ;
Wohlgenannt, Rainer ;
Maier, Thomas ;
Litzenberger, Martin .
IEEE SENSORS JOURNAL, 2009, 9 (5-6) :654-664
[8]  
SMITH DY, 1998, HDB OPTICAL CONSTANT, P369
[9]  
SYLLAIOS AJ, 2004, Patent No. 2004094969
[10]  
WELING AS, 2006, P SPIE, V6206, P61101