Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 μg and bandwidth of 300 Hz

被引：53

作者：

Aaltonen, Lasse ^{[1
]}

Halonen, Kari ^{[1
]}

机构：

[1] Aalto Univ, SMARAD 2, Elect Circuit Design Lab, FIN-02150 Espoo, Finland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 154卷 / 01期

关键词：

Accelerometer; Continuous-time; Force-feedback; High-resolution; MEMS; Force-balance; NOISE; SENSOR;

D O I：

10.1016/j.sna.2009.07.011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A continuous-time accelerometer interface is feasible when a high dynamic range together with a wide signal band is required. In this paper the implementation of a continuous-time force-feedback loop for a capacitive sensor element with a full-scale signal of +/- 1.5g is presented. The interface is measured to attain a noise equivalent acceleration (NEA) density of 500ng/root Hz at 30 Hz for the on-chip digitized output and 300ng/root Hz at 30 Hz for the analog output using a capacitive half-bridge sensor element with a single pair of electrodes. The essential circuit structures of the closed-loop sensor will be presented and analyzed in detail. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：46 / 56

页数：11

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