Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material

被引：48

作者：

Nishikubo, Tadatomi ^{[1
]}

Kudo, Hiroto ^{[1
]}

Suyama, Yuji ^{[1
]}

Oizumi, Hiroaki ^{[2
]}

Itani, Toshiro ^{[2
]}

机构：

[1] Kanagawa Univ, Fac Engn, Dept Mat & Life Chem, Kanagawa Ku, Yokoham 2218686, Japan

[2] Selete Semicond Leading Edge Technol Inc, Res Dept 3, Tsukuba, Ibaraki 3058569, Japan

来源：

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2009年 / 22卷 / 01期

关键词：

noria; adamantane; chemically amplification; extreme ultraviolet; resist; HIGH-RESOLUTION; CROSS-LINKER; RESISTS; AMPLIFICATION; SENSITIVITY; DESIGN;

D O I：

10.2494/photopolymer.22.73

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

[No abstract available]

引用

页码：73 / 76

页数：4

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