EHD MICRO PUMP USING PYROLYZED POLYMER 3-D CARBON MESH ELECTRODES

被引：4

作者：

Wakui, Daisuke ^{[1
]}

Imai, Naoki ^{[1
]}

Nagaura, Yasuhiro ^{[1
]}

Sato, Hironobu ^{[1
]}

Sekiguchi, Tetsushi ^{[1
]}

Konishi, Satoshi ^{[2
]}

Shoji, Shuichi ^{[1
]}

Homma, Takayuki ^{[1
]}

机构：

[1] Waseda Univ, Tokyo, Japan

[2] Ritsumeikan Univ, Dept Micro Syst Technol, Ritsumeikan, Japan

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

D O I：

10.1109/MEMSYS.2009.4805428

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90 degrees C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

引用

页码：499 / 502

页数：4

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