Nanoscale measurements of coupled mechanical, electrical and thermal properties using a novel characterization tool

This paper presents the design and development of a nanomechanical, electrical and thermal (NMET) characterization tool for coupled measurements of one-dimensional nanostructures. The device is designed to operate inside an environmental scanning electron microscope (ESEM) to facilitate in-situ imaging, positioning and testing. The design includes a custom nanomanipulator system, which assists in controlled placement of individual one-dimensional nanostructures (specimens) between two probes. Sample straining and unique direct force and displacement measurements are achieved by the use of a commercially available actuator. The "next generation" tool is also discussed.