Laser molecular beam epitaxy of BaTiO3 and SrTiO3 ultra thin films

被引:15
作者
Lu, HB [1 ]
Wang, N
Chen, WZ
Chen, F
Zhao, T
Peng, HY
Lee, ST
Yang, GZ
机构
[1] Chinese Acad Sci, Inst Phys, Lab Opt Phys, Beijing 100080, Peoples R China
[2] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
基金
中国国家自然科学基金;
关键词
laser molecular beam epitaxy; oxide; ultra thin films;
D O I
10.1016/S0022-0248(99)00840-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
BaTiO3(BTO) and SrTiO3(STO) ultra thin films of 1-10 unit cell layers are successfully fabricated on STO(0 0 1) substrates by laser molecular beam epitaxy. Measurements of atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM) and X-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:173 / 177
页数:5
相关论文
共 14 条
[1]   Crystallographic and microstructural studies of BaTiO3 thin films grown on SrTiO3 by laser molecular beam epitaxy [J].
Cui, DF ;
Wang, HS ;
Chen, ZH ;
Zhou, YL ;
Lu, HB ;
Yang, GZ ;
Ma, K ;
Chen, H ;
Li, L ;
Liu, W ;
Zhang, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (02) :275-278
[2]   The interface roughness exponent in GexSi1-x/Si superlattices [J].
Cui, SF ;
Luo, GM ;
Li, M ;
Mai, ZH ;
Cui, Q ;
Zhou, JM ;
Jiang, XM ;
Zhang, WL .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1997, 9 (14) :2891-2902
[3]   ATOMIC LAYER GROWTH OF OXIDE THIN-FILMS WITH PEROVSKITE-TYPE STRUCTURE BY REACTIVE EVAPORATION [J].
IIJIMA, K ;
TERASHIMA, T ;
BANDO, Y ;
KAMIGAKI, K ;
TERAUCHI, H .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :2840-2845
[4]   ATOMIC LAYER AND UNIT-CELL LAYER GROWTH OF (CA,SR)CUO2 THIN-FILM BY LASER MOLECULAR-BEAM EPITAXY [J].
KANAI, M ;
KAWAI, T ;
KAWAI, S .
APPLIED PHYSICS LETTERS, 1991, 58 (07) :771-773
[5]   MOLECULAR-BEAM EPITAXY OF BI2SR2CUOX AND BI2SR2CA0.85SR0.15CU2OX ULTRA THIN-FILMS AT 300-DEGREES-C [J].
KAWAI, M ;
WATANABE, S ;
HANADA, T .
JOURNAL OF CRYSTAL GROWTH, 1991, 112 (04) :745-752
[6]   CONTROLLED FORMATION OF OXIDE MATERIALS BY LASER MOLECULAR-BEAM EPITAXY [J].
KOINUMA, H ;
YOSHIMOTO, M .
APPLIED SURFACE SCIENCE, 1994, 75 :308-319
[7]   PREPARATION OF LARGE-AREA HIGH-QUALITY YBCO THIN-FILMS BY PULSED-LASER DEPOSITION WITH SI HEATER AND COMPOSITE SCANNING OF LASER AND TARGET [J].
LU, HB ;
XU, SF ;
TIAN, YJ ;
CUI, DF ;
CHEN, ZH ;
ZHANG, YZ ;
LI, L ;
YANG, GZ .
JOURNAL OF SUPERCONDUCTIVITY, 1993, 6 (05) :335-337
[8]   BaTiO3 thin films grown on SrTiO3 substrates by a molecular-beam-epitaxy method using oxygen radicals [J].
Shigetani, H ;
Kobayashi, K ;
Fujimoto, M ;
Sugimura, W ;
Matsui, Y ;
Tanaka, J .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :693-697
[9]   Y-BA-CU-O DY-BA-CU-O SUPERLATTICES - A 1ST STEP TOWARDS THE ARTIFICIAL CONSTRUCTION OF HIGH-TC SUPERCONDUCTORS [J].
TRISCONE, JM ;
KARKUT, MG ;
ANTOGNAZZA, L ;
BRUNNER, O ;
FISCHER, O .
PHYSICAL REVIEW LETTERS, 1989, 63 (09) :1016-1019
[10]   Layer by layer growth of BaTiO3 thin films with extremely smooth surfaces by laser molecular beam epitaxy [J].
Wang, HS ;
Ma, K ;
Cui, DF ;
Peng, ZQ ;
Zhou, YL ;
Lu, HB ;
Chen, ZH ;
Li, L ;
Yang, GZ .
JOURNAL OF CRYSTAL GROWTH, 1997, 177 (1-2) :67-73