Patterning properties of PZT thick films made by aerosol deposition

被引：0
作者：
Lebedev, M [1 ]
Akedo, J [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan
来源：
FERROELECTRICS | 2002年 / 270卷
关键词：
piezoelectric thick film; aerosol deposition method; micro fabrication; structuring; PZT; ultrafine particles;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Factors responsible for a sidewall formation of thick PZT films prepared by impact based deposition technique were experimentally investigated. An inclination of patterns sidewall is mainly determined by velocity of the impacted particles. For 100-mum-thick PZT film made by aerosol deposition method a pattern with the sidewall angle 60degrees was achieved.
引用
收藏
页码：1303 / 1308
页数：6
相关论文
共 15 条
  • [1] Piezoelectric properties and poling effect of Pb(Zr, Ti)O3 thick films prepared for microactuators by aerosol deposition
    Akedo, J
    Lebedev, M
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (11) : 1710 - 1712
  • [2] Microstructure and electrical properties of lead zirconate titanate (Pb(Zr52/Ti48)O3) thick films deposited by aerosol deposition method
    Akedo, J
    Lebedev, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B): : 5397 - 5401
  • [3] Akedo J, 1999, FERROELECTRICS, V231, P873, DOI 10.1080/00150199908014545
  • [4] Akedo J., 1999, Oyo Buturi, V68, P44
  • [5] Jet molding system for realization of three-dimensional micro-structures
    Akedo, J
    Ichiki, M
    Kikuchi, K
    Maeda, R
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1998, 69 (01) : 106 - 112
  • [6] DIELECTRIC, FERROELECTRIC, AND PIEZOELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THICK-FILMS ON SILICON SUBSTRATES
    CHEN, HD
    UDAYAKUMAR, KR
    CROSS, LE
    BERNSTEIN, JJ
    NILES, LC
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) : 3349 - 3353
  • [7] CHUNG CW, 1998, J VAC SCI TECHNOL B, V16, P1984
  • [8] DELAMORA JF, 1990, J AEROSOL SCI, V21, P169
  • [9] IDE T, 1991, J PREC ENG JPN, V57, P143
  • [10] DEPOSITION OF ULTRA FINE PARTICLES USING A GAS-JET
    KASHU, S
    FUCHITA, E
    MANABE, T
    HAYASHI, C
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (12): : L910 - L912
12