ADVANCEMENTS IN TECHNOLOGY AND DESIGN OF BIOMIMETIC FLOW-SENSOR ARRAYS

被引：36
作者：
Bruinink, C. M. [1 ]
Jaganatharaja, R. K.
de Boer, M. J.
Berenschot, E.
Kolster, M. L.
Lammerink, T. S. J.
Wiegerink, R. J.
Krijnen, G. J. M.
机构：
[1] Univ Twente, MESA Res Inst, POB 217, NL-7500 AE Enschede, Netherlands
来源：
IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年
关键词：
RECEPTOR HAIRS;
D O I：
10.1109/MEMSYS.2009.4805341
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensor-model predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm.s(-1)) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.
引用
收藏
页码：152 / 155
页数：4
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