A Flowmeter with Piezoresistive Metal Layer Deposited with Focused-Ion-Beam System

被引:1
作者
Choi, Dae Keun [1 ]
Lee, Sang Hoon [1 ,2 ]
机构
[1] Seoul Natl Univ Sci & Technol, Grad Sch NID Fus Technol, Seoul 139743, South Korea
[2] Seoul Natl Univ Sci & Technol, Dept Mech & Automot Engn, Seoul 139743, South Korea
基金
新加坡国家研究基金会;
关键词
Flowmeter; focused-ion-beam system (FIB system); piezoresistive material; small area detection; MEMS; AIR-FLOW SENSOR; TEMPERATURE; FABRICATION; HUMIDITY; DESIGN;
D O I
10.1080/10584587.2014.912910
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we fabricated and evaluated a flowmeter with a sub-micron sized piezoresistive layer for the measurement in the small area. For the small area detection, the sensing material should be reduced as well as sensor body. We use the FIB system to reduce the size of the sensing material and obtain the sub-micron sized line width. The device is fabricated with the standard MEMS process, and the platinum layer is selected as the piezoresistive material considering the electrical conductivity. The 0 similar to 4m/s air flows are applied to the flowmeter and the experimental results shows the negative sensitivity output with -3.22E(-5)/ms(-1). This negative value is due to the additional materials like carbon and gallium. The various experiments including stability and repeatability are performed, and the repeated operation shows stable output signals with less than 9.6% variation. Through those experiment results, the FIB assisted platinum layer is suitable for the piezoresistive detection and a flowmeter can be applied to measurement of flow rate in the small area.
引用
收藏
页码:157 / 167
页数:11
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