An accurate calculation of spreading resistance

被引：64

作者：

Denhoff, M. W. ^{[1
]}

机构：

[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2006年 / 39卷 / 09期

关键词：

D O I：

10.1088/0022-3727/39/9/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The spreading resistance of a round ohmic contact was calculated by solving the Laplace equation using, analytical, numerical and finite element methods. From this, formulae were found to calculate accurate values (better than 0.1%) of the spreading resistance over the entire range of contact size to substrate thickness ratio.

引用

页码：1761 / 1765

页数：5

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