共 23 条
[1]
Buchroeder R. A., 1976, THESIS
[2]
A rigorous method for compensation selection and alignment of microlithographic optical systems
[J].
EMERGING LITHOGRAPHIC TECHNOLOGIES II,
1998, 3331
:102-113
[6]
Hopkins H.H., 1950, Wave theory of aberrations
[10]
Study on computer-aided alignment method
[J].
Optical Design and Testing II, Pts 1 and 2,
2005, 5638
:674-681