Characterization of metal-oxide nanosensors fabricated with focused ion beam (FIB)

被引：31

作者：

Hernandez-Ramirez, F.

Rodriguez, J.

Casals, O.

Russinyol, E.

Vila, A.

Romano-Rodriguez, A.

Morante, J. R.

Abid, M.

机构：

[1] Univ Barcelona, Dept Elect, EME CErMAE, CEMIC, E-08028 Barcelona, Spain

[2] Ecole Polytech Fed Lausanne, Lab Phys Mat Nanostruct, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 118卷 / 1-2期

关键词：

metal-oxide; gas nanosensors; FIB;

D O I：

10.1016/j.snb.2006.04.022

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A procedure to contact single metal-oxide nanowires and nanoparticles of different materials using a Dual Beam FIB has been developed. The quality of the electrical contacts has been evaluated and the possibility of extracting the electrical parameters of these nanowires and nanoparticles demonstrated. The response of some of them to different gases is presented, proving the feasibility of fabricating metal-oxide nanosensors. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：198 / 203

页数：6

共 20 条

[1] Field-effect transistors based on single semiconducting oxide nanobelts [J].