A highly sensitive and precise temperature sensor based on optoelectronic oscillator

被引：18

作者：

Xu, Luoqiu ^{[1
]}

Hu, Xiao ^{[2
,3
]}

Zhang, Yuguang ^{[2
,3
]}

Yi, Jinqiao ^{[4
]}

Yu, Yu ^{[1
]}

Xiao, Xi ^{[2
,3
]}

Yu, Yuan ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China

[2] China Information & Commun Technol Grp Corp CICT, State Key Lab Opt Commun Technol & Networks, Wuhan 430074, Peoples R China

[3] Natl Informat Optoelect Innovat Ctr, Wuhan 430074, Hubei, Peoples R China

[4] Hubei Minzu Univ, Sch Informat Engn, Enshi 445000, Hubei, Peoples R China

来源：

OPTICS COMMUNICATIONS | 2021年 / 483卷

基金：

中国国家自然科学基金;

关键词：

Microring resonator; Microwave photonics; Optical sensor; Optoelectronic oscillator; ENHANCED SENSITIVITY; SILICON; SYSTEM; INTERROGATION; RESONATORS; DESIGN; STRAIN; FILTER;

D O I：

10.1016/j.optcom.2020.126625

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We proposed and demonstrated an optoelectronic oscillator (OEO) based temperature sensor with high sensitivity and precision. The sensor is realized using a silicon-on-insulator-based microring resonator (MRR) and a dual-loop structure. The MRR, which acts as a sensing probe, is optimized and designed to have an ultrahigh Q factor and high sensitivity to temperature variations simultaneously. The dual-loop structure is used to further stabilize the oscillating frequency of OEO. By doing so, we achieved an on-chip temperature sensor with a sensing precision of +/- 1.73x10(-4) degrees C. Meanwhile, the sensing resolution and sensitivity are 6.79 x 10(-3) degrees C and 10.02 GHz/degrees C, respectively. The impact of the size of the MRR on the temperature sensor is also investigated.

引用

页数：7

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