Simple phase-shifting method in a wedge-plate lateral-shearing interferometer

被引:35
作者
Song, JB
Lee, YW
Lee, IW
Lee, YH
机构
[1] Korea Res Inst Stand & Sci, Photometry & Imaging Opt Grp, Taejon 305600, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305600, South Korea
关键词
D O I
10.1364/AO.43.003989
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A simple phase-shifting method in a wedge-plate lateral shearing interferometer is described. Simply moving the wedge plate in an in-plane parallel direction gives the amount of phase shift required for phase-shifting interferometry because the thickness of a wedge plate is not constant and varies along the wedge direction. This method requires only one additional linear translator to move the wedge plate. The required moving distance for a phase shift of the wave front with this method is of the order of a millimeter, whereas the typical moving distance for another method that uses a piezoelectric transducer is of the order of a wavelength. This method yields better precision in controlling the moving distance than do the other methods. (C) 2004 Optical Society of America.
引用
收藏
页码:3989 / 3992
页数:4
相关论文
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[11]   ASPHERICAL SURFACE TESTING WITH SHEARING INTERFEROMETER USING FRINGE SCANNING DETECTION METHOD [J].
YATAGAI, T ;
KANOU, T .
OPTICAL ENGINEERING, 1984, 23 (04) :357-360