An application of XML to geometric modeling of MEMS

被引：2
|
作者：
Lee, JH [1 ]
Wu, HC [1 ]
Lee, WT [1 ]
Cheng, CW [1 ]
机构：
[1] Natl Ctr High Performance Comp, Hsinchu, Taiwan
来源：
DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002 | 2002年 / 4755卷
关键词：
MEMS; XML; CAD; geometric modeling;
D O I：
10.1117/12.462810
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The necessary information for geometric modeling of MEMS consists of a mask layout file and a process definition file. CIF and GDSII are commonly accepted formats for the mask layout file. However, there are no standard ways to express the process definition file. In this paper, we propose an XML (Extensible Markup Language) data model to describe the process definition file for geometric modeling of surface-micromachined MEMS. This model has been incorporated in our CAD system. The results of implementation show that the XML approach not only facilitates the development of applications but also helps the exchange of information.
引用
收藏
页码：183 / 190
页数：8
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