An application of XML to geometric modeling of MEMS

被引：2
|
作者：
Lee, JH [1 ]
Wu, HC [1 ]
Lee, WT [1 ]
Cheng, CW [1 ]
机构：
[1] Natl Ctr High Performance Comp, Hsinchu, Taiwan
来源：
DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002 | 2002年 / 4755卷
关键词：
MEMS; XML; CAD; geometric modeling;
D O I：
10.1117/12.462810
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The necessary information for geometric modeling of MEMS consists of a mask layout file and a process definition file. CIF and GDSII are commonly accepted formats for the mask layout file. However, there are no standard ways to express the process definition file. In this paper, we propose an XML (Extensible Markup Language) data model to describe the process definition file for geometric modeling of surface-micromachined MEMS. This model has been incorporated in our CAD system. The results of implementation show that the XML approach not only facilitates the development of applications but also helps the exchange of information.
引用
收藏
页码：183 / 190
页数：8
相关论文
共 50 条
  • [11] Three-dimensional geometric modeling based on parametric design and its application in enterprise production
    Chen, M
    Huang, DG
    Zhang, DY
    Zhang, J
    PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION, 2004, : 733 - 738
  • [12] Towards XML metamodel patterns for XML data modeling
    Hu, ZJ
    Vollmar, G
    12TH INTERNATIONAL WORKSHOP ON DATABASE AND EXPERT SYSTEMS APPLICATIONS, PROCEEDINGS, 2001, : 71 - 75
  • [13] A practical application of our MDD approach for modeling secure XML data warehouses
    Vela, Belen
    Blanco, Carlos
    Fernandez-Medina, Eduardo
    Marcos, Esperanza
    DECISION SUPPORT SYSTEMS, 2012, 52 (04) : 899 - 925
  • [14] Representation of practice guidelines with XML - Modeling with XML Schema
    Hoelzer, S
    Schweiger, R
    Dudeck, J
    METHODS OF INFORMATION IN MEDICINE, 2002, 41 (04) : 305 - 312
  • [15] Application of XML in DICOM
    You, XZ
    Yao, ZH
    Medical Imaging 2005: PACS and Imaging Informatics, 2005, 5748 : 446 - 454
  • [16] A MODELING AND EXPERIMENTAL ANALYSIS OF FRACTAL GEOMETRIC POTENTIAL MEMS IN THE CONTEXT OF THE DEVELOPMENT OF 6G AND BEYOND
    Tian, Dan
    Huang, Zixuan
    Xiang, Jingjing
    FRACTALS-COMPLEX GEOMETRY PATTERNS AND SCALING IN NATURE AND SOCIETY, 2024,
  • [17] Modeling imprecise requirements with XML
    Lee, J
    Fanjiang, YY
    INFORMATION AND SOFTWARE TECHNOLOGY, 2003, 45 (07) : 445 - 460
  • [18] Modeling imprecise requirements with XML
    Lee, J
    Fanjiang, YY
    Kuo, JY
    Lin, YY
    PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL CONFERENCE ON FUZZY SYSTEMS, VOL 1 & 2, 2002, : 861 - 866
  • [19] A Survey to Conceptual Modeling for XML
    Chen, Haitao
    Liao, Husheng
    PROCEEDINGS OF 2010 3RD IEEE INTERNATIONAL CONFERENCE ON COMPUTER SCIENCE AND INFORMATION TECHNOLOGY (ICCSIT 2010), VOL 8, 2010, : 473 - 477
  • [20] Conceptual Modeling for XML: A Survey
    Necasky, Martin
    DATESO 2006 - DATABASES, TEXTS, SPECIFICATIONS, OBJECTS: PROCEEDINGS OF THE 6TH ANNUAL INTERNATIONAL WORKSHOP, 2006, 176 : 40 - 53
12345