Nanostructured molybdenum nitride-based coatings: Effect of nitrogen concentration on microstructure and mechanical properties

被引：15

作者：

Wang, Jian ^{[1
]}

Munroe, Paul ^{[1
]}

Zhou, Zhifeng ^{[2
]}

Xie, Zonghan ^{[3
,4
]}

机构：

[1] UNSW Sydney, Sch Mat Sci & Engn, Sydney, NSW 2052, Australia

[2] City Univ Hong Kong, Dept Mech & Biomed Engn, Kowloon, Hong Kong, Peoples R China

[3] Univ Adelaide, Sch Mech Engn, Adelaide, SA 5005, Australia

[4] Edith Cowan Univ, Sch Engn, Joondalup, WA 6027, Australia

来源：

THIN SOLID FILMS | 2019年 / 682卷

基金：

澳大利亚研究理事会;

关键词：

Molybdenum nitride coatings; Magnetron sputtering; Optical emission monitoring; Wear tests; Scratch tests; SUBSTRATE-TEMPERATURE; WEAR PROPERTIES; HARD COATINGS; THIN-FILMS; MON FILMS; FRICTION; BEHAVIOR; SUPERCONDUCTIVITY; DEPOSITION; OXIDATION;

D O I：

10.1016/j.tsf.2019.05.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Molybdenum nitride (MoNx) coatings were deposited onto AISI M2 tool steel substrates (hardened to HRC 60) by magnetron sputtering. The nitrogen content was controlled by means of a closed-loop optical emission monitor. The coating microstructure was examined by X-ray photoelectron spectroscopy, X-ray diffraction, scanning electron microscopy and transmission electron microscopy. This showed that the increased nitrogen content led to a transformation from body-centered cubic alpha-Mo phase to gamma-Mo2N phase (NaCl-B1 type) and then to a face-centered cubic MoN phase. The mechanical and tribological properties of these coatings were evaluated by nano-indentation, wear and scratch testing. The gamma-Mo2N coating showed the highest hardness and the highest values of H (hardness)/E* (effective elastic modulus) and H-3/E* ratio. During scratch and wear tests, the gamma-Mo2N coating exhibited the best resistance to deformation and the lowest wear rate.

引用

页码：82 / 92

页数：11

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