Nanometer Scale Alignment of Block-Copolymer Domains by Means of a Scanning Probe Tip

被引：21

作者：

Felts, Jonathan R. ^{[1
]}

Onses, M. Serdar ^{[2
]}

Rogers, John A. ^{[2
]}

King, William P. ^{[1
]}

机构：

[1] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA

[2] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

来源：

ADVANCED MATERIALS | 2014年 / 26卷 / 19期

关键词：

block-copolymer lithography; tip-based nanofabrication; shear alignment; DIP-PEN NANOLITHOGRAPHY; MOLECULAR-LEVEL CONTROL; THIN-FILMS; LITHOGRAPHY; ORIENTATION; PATTERNS; POLYMER; SHEARING; LAMELLAE;

D O I：

10.1002/adma.201305481

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Alignment of perpendicularly oriented lamellar block copolymer domains using an AFM tip is demonstrated. The AFM tip orients the domains through local shearing, resulting in domain alignment parallel to tip travel. AFM tips can also deposit block copolymer nanostructures on heated substrates with a variety of experimentally observed domain alignments. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：2999 / 3002

页数：4

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