Nanostructured and columnar vanadium and vanadium oxides films synthesized by means of magnetron-based gas aggregation source

被引：13

作者：

Hankova, Adela ^{[1
]}

Kuzminova, Anna ^{[1
]}

Hanus, Jan ^{[1
]}

Kosutova, Tereza ^{[2
]}

Solar, Pavel ^{[1
]}

Kousal, Jaroslav ^{[1
]}

Kylian, Ondrej ^{[1
]}

机构：

[1] Charles Univ Prague, Fac Math & Phys, Dept Macromol Phys, V Holesovickach 2, Prague 18000 8, Czech Republic

[2] Charles Univ Prague, Fac Math & Phys, Dept Condensed Matter Phys, Ke Karlovu 5, Prague 12116 2, Czech Republic

来源：

SURFACE & COATINGS TECHNOLOGY | 2022年 / 431卷

关键词：

Gas aggregation sources; Glancing angle deposition; Vanadium nanoparticles; Vanadium pentoxide nanoparticles; Mesoporous coatings; THIN-FILMS; NANOCLUSTER FILMS; ANGLE DEPOSITION; NANOPARTICLES; MORPHOLOGY; V2O5; SIZE; XPS; CU; MICROSTRUCTURE;

D O I：

10.1016/j.surfcoat.2021.128015

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this study the possibility to employ magnetron-based gas aggregation source for the effective and facile production of mesoporous vanadium films composed of individual vanadium nanoparticles is investigated. It is demonstrated that due to the high deposition rate of V nanoparticles under optimized conditions, their low impact energies, and the directionality of the deposition process, it is possible not only to produce porous nanoparticle coatings, but also coatings with columnar structures. Furthermore, it is shown that such produced coatings may be easily transformed into vanadium pentoxide ones by their annealing in air at the temperature of 550 ?C, without loosening the mesoporous character of resulting films.

引用

页数：9

共 49 条

[1] Synthesis of flower-like tungsten nanoparticles by magnetron sputtering combined with gas aggregation [J].