Development of a novel Fabry-Perot pressure microsensor

被引：33

作者：

Wang, WJ ^{[1
]}

Lin, RM ^{[1
]}

Guo, DG ^{[1
]}

Sun, TT ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Ctr Mech Microsyst, Singapore 639798, Singapore

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 116卷 / 01期

关键词：

MEMS; Fabry-Perot; pressure sensor; corrugated diaphragm;

D O I：

10.1016/j.sna.2004.03.032

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new Fabry-Perot cavity-based pressure sensor with a novel single deeply corrugated diaphragm (SDCD) is presented. The SDCD serving as the moving mirror of the proposed Fabry-Perot cavity consists of a flat bottom-region that is suspended all around with free-sidewalls. The flexible suspending sidewalls have both buffering and stress-releasing effects, thereby enhancing the degree of flatness of the moving mirror under pressurized deflection, and reducing the temperature dependence caused by the mismatch in coefficients of thermal expansions (CTEs) among materials. Both analytical and experimental results have shown that both the signal-averaging effect and cross-sensitivity to temperature with diaphragm-type Fabry-Perot cavity-based pressure sensors, can be alleviated by the proposed technique. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：59 / 65

页数：7

共 14 条

[1] A novel MEMS pressure sensor fabricated on an optical fiber [J].

Abeysinghe, DC ;

Dasgupta, S ;

Boyd, JT ;

Jackson, HE .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (09) :993-995

[2] SURFACE MICROMACHINED TUNABLE INTERFEROMETER ARRAY [J].

ARATANI, K ;

FRENCH, PJ ;

SARRO, PM ;

POENAR, D ;

WOLFFENBUTTEL, RF ;

MIDDELHOEK, S .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :17-23

[3]

Born M., 1986, PRINCIPLES OPTICS

[4] A MICROMACHINED PRESSURE SENSOR WITH FIBEROPTIC INTERFEROMETRIC READOUT [J].

CHAN, MA ;

COLLINS, SD ;

SMITH, RL .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :196-201

[5] Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters [J].

Chen, TC ;

Kuo, JI ;

Lee, KL ;

Lee, CC .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (6A) :4087-4096

[6] Performance of Fabry-Perot microcavity structures with corrugated diaphragms [J].

Han, J ;

Kim, J ;

Kim, TS ;

Kim, JS .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 79 (02) :162-172

[7] Novel fabrication and characterization method of Fabry-Perot microcavity pressure sensors [J].

Han, JH .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 75 (02) :168-175

[8] Micromachined Fabry-Perot cavity pressure transducer [J].

Kim, Y ;

Neikirk, DP .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (12) :1471-1473

[9]

KIM Y, 1995, SPIE, V2624, P242

[10] Sensitivity-improved silicon condenser microphone with a novel single deeply corrugated diaphragm [J].

Li, XX ;

Lin, RM ;

Kek, H ;

Miao, JM ;

Zou, QB .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 92 (1-3) :257-262

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