Radiation resistance of wide-bandgap semiconductor power transistors

被引:37
作者
Hazdra, Pavel [1 ]
Popelka, Stanislav [1 ]
机构
[1] Czech Tech Univ, Dept Microelect, Tech 2, Prague 16627 6, Czech Republic
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2017年 / 214卷 / 04期
关键词
electron irradiation; GaN; power transistors; radiation effects; SiC; DEEP-LEVEL DEFECTS; ELECTRON-IRRADIATION; SILICON-CARBIDE; 1200; V; TEMPERATURE;
D O I
10.1002/pssa.201600447
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Radiation resistance of state-of-the-art commercial wide-bandgap power transistors, 1700V 4H-SiC power MOSFETs and 200V GaN HEMTs, to the total ionization dose was investigated. Transistors were irradiated with 4.5 MeV electrons with doses up to 2000 kGy. Electrical characteristics and introduced defects were characterized by current-voltage (I-V), capacitance-voltage (C-V), and deep level transient spectroscopy (DLTS) measurements. Results show that already low doses of 4.5MeV electrons (> 1 kGy) cause a significant decrease in threshold voltage of SiC MOSFETs due to embedding of the positive charge into the gate oxide. On the other hand, other parameters like the ON-state resistance are nearly unchanged up to the dose of 20 kGy. At 200 kGy, the threshold voltage returns back close to its original value, however, the ON-state resistance increases and transconductance is lowered. This effect is caused by radiation defects introduced into the low-doped drift region which decrease electron concentration and mobility. GaN HEMTs exhibit significantly higher radiation resistance. They keep within the datasheet specification up to doses of 2000 kGy. Absence of dielectric layer beneath the gate and high concentration of carriers in the two dimensional electron gas channel are the reasons of higher radiation resistance of GaN HEMTs. Their degradation then occurs at much higher doses due to electron mobility degradation. (C) 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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页数:8
相关论文
共 22 条
[1]   Radiation Effects in Commercial 1200 V 24 A Silicon Carbide Power MOSFETs [J].
Akturk, A. ;
McGarrity, J. M. ;
Potbhare, S. ;
Goldsman, N. .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2012, 59 (06) :3258-3264
[2]   Annealing behavior between room temperature and 2000°C of deep level defects in electron-irradiated n-type 4H silicon carbide -: art. no. 043518 [J].
Alfieri, G ;
Monakhov, EV ;
Svensson, BG ;
Linnarsson, MK .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (04)
[3]  
Allen A. S., 2015, MATER SCI FORUM, V821-823, P701
[4]  
Balaz D., 2010, THESIS, P38
[5]   Low temperature annealing of electron irradiation induced defects in 4H-SiC [J].
Castaldini, A ;
Cavallini, A ;
Rigutti, L ;
Nava, F .
APPLIED PHYSICS LETTERS, 2004, 85 (17) :3780-3782
[6]   Total dose radiation response of nitrided and non-nitrided SiO2/4H-SiC MOS capacitors [J].
Dixit, Sriram K. ;
Dhar, Sarit ;
Rozen, John ;
Wang, Sanwu ;
Schrimpf, Ronald D. ;
Fleetwood, Daniel M. ;
Pantelides, Sokrates T. ;
Williams, John. R. ;
Feldman, Leonard C. .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2006, 53 (06) :3687-3692
[7]   Point Defects in 4H-SiC Epilayers Introduced by 4.5 MeV Electron Irradiation and Their Effect on Power JBS SiC Diode Characteristics [J].
Hazdra, Pavel ;
Zahlava, Vit ;
Vobecky, Jan .
GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XV, 2014, 205-206 :451-456
[8]   Deep level defects in electron-irradiated 4H SiC epitaxial layers [J].
Hemmingsson, C ;
Son, NT ;
Kordina, O ;
Bergman, JP ;
Janzen, E ;
Lindstrom, JL ;
Savage, S ;
Nordell, N .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (09) :6155-6159
[9]   Effect of electron irradiation on AlGaN/GaN and InAlN/GaN heterojunctions [J].
Hwang, Ya-Shi ;
Liu, Lu ;
Ren, Fan ;
Polyakov, Alexander Y. ;
Smirnov, N. B. ;
Govorkov, A. V. ;
Kozhukhova, E. A. ;
Kolin, N. G. ;
Boiko, V. M. ;
Vereyovkin, S. S. ;
Ermakov, V. S. ;
Lo, Chien-Fong ;
Laboutin, Oleg ;
Cao, Y. ;
Johnson, J. W. ;
Kargin, N. I. ;
Ryzhuk, R. V. ;
Pearton, Stephen J. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 31 (02)
[10]  
Ikpe SA, 2016, INT RELIAB PHY SYM