Laser shaping of photonic materials: deep-ultraviolet and ultrafast lasers

被引:177
作者
Herman, PR
Marjoribanks, RS
Oettl, A
Chen, K
Konovalov, I
Ness, S
机构
[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada
[2] Univ Toronto, Dept Phys, Toronto, ON M5S 1A7, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
laser micromachining; ablation; photosensitivity; ultrafast lasers; F-2-laser; photonics;
D O I
10.1016/S0169-4332(99)00463-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Optical materials are especially challenging to process with conventional lasers simply because of their high transparency. We are exploiting two extremes in laser technology - ultrafast lasers and very short wavelength Fz lasers - to microsculpt surfaces and to control refractive index in transparent glasses. These lasers drive fundamentally different interactions, many-photon and 'big' photon, respectively, that offer distinct advantages and limitations for shaping photonic devices in fused silica. Comparisons of surface morphology, shock-induced microcracking, resolution, and photosensitivity responses are presented. (C) 2000 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:577 / 586
页数:10
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