Investigation of the thermal processes in electron-beam surface modification by means of a scanning electron beam

被引:7
作者
Ormanova, M. [1 ]
Angelov, Vl [2 ]
Petrov, P. [1 ]
机构
[1] Bulgarian Acad Sci, Emil Djakov Inst Elect, 72 Tzarigradsko Chaussee, BU-1784 Sofia, Bulgaria
[2] Bulgarian Acad Sci, Inst Nucl Res & Nucl Energy, 72 Tzarigradsko Chaussee, BU-1784 Sofia, Bulgaria
来源
19TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2015) | 2016年 / 700卷
关键词
D O I
10.1088/1742-6596/700/1/012033
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work we present a study of the thermal processes taking place during surface modification of steels performed by a scanning electron beam. The model is based on solving the heat transfer equation by means of Green functions. The thermal field was calculated, together with the size of the zone of structural changes in tool steel samples. The comparison of the zones of thermal treatment as experimentally obtained and theoretically calculated and the corresponding structural changes show a very good agreement.
引用
收藏
页数:5
相关论文
共 50 条
[31]   Thermal conduction induced by electron-beam [J].
Wong, Basil T. ;
Menguec, M. Pinar ;
Vallance, R. Ryan .
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2007, 50 (25-26) :5099-5107
[32]   ELECTRON-BEAM LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE [J].
MARRIAN, CRK ;
DOBISZ, EA ;
DAGATA, JA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2877-2881
[33]   Diagnostic investigation of the abdominal vasculature by means of electron-beam computed tomography [J].
Vogl, TJ ;
Diebold, T ;
Hammerstingl, R ;
Balzer, JO ;
Hidajat, N ;
Zipfel, B ;
Scheinert, D ;
Vogt, A ;
Beier, J ;
Felix, R .
RADIOLOGE, 1998, 38 (12) :1069-1076
[34]   SCANNING ELECTRON-BEAM PROBES VLSI CHIPS [J].
FAZEKAS, P ;
FEUERBAUM, HP ;
WOLFGANG, E .
ELECTRONICS, 1981, 54 (14) :105-112
[35]   DISTORTION CORRECTION IN SCANNING ELECTRON-BEAM SYSTEMS [J].
VISWANATHAN, R ;
CHANG, THP ;
COFFEY, D .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) :C157-C157
[36]   SIMPLIFIED THERMAL MODELS IN LASER AND ELECTRON-BEAM SURFACE HARDENING [J].
FESTA, R ;
MANCA, O ;
NASO, V .
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1990, 33 (11) :2511-2518
[37]   DEFLECTION DISTORTION IN SCANNING ELECTRON-BEAM SYSTEMS [J].
CHANG, THP ;
VISWANATHAN, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :878-882
[38]   PROGRAMMED SCANNING OF AN ELECTRON-BEAM FOR WELDING AND MACHINING [J].
TOMSON, TI ;
NAZARENKO, OK .
WELDING PRODUCTION, 1974, 21 (03) :77-78
[39]   SCANNING ELECTRON-BEAM ANNEALING WITH A MODIFIED SEM [J].
RATNAKUMAR, KN ;
PEASE, RFW ;
BARTELINK, DJ ;
JOHNSON, NM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1843-1846
[40]   FORMATION OF RAPIDLY MELTED SURFACE-LAYERS BY ELECTRON-BEAM SCANNING [J].
STRUTT, PR .
MATERIALS SCIENCE AND ENGINEERING, 1981, 49 (01) :87-91