Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique

被引：45

作者：

Kobayashi, M

Olding, TR

Sayer, M

Jen, CK

机构：

[1] Natl Res Council Canada, Inst Ind Mat, Boucherville, PQ J4B 6Y4, Canada

[2] McGill Univ, Dept ECE, Montreal, PQ H3A 2A7, Canada

[3] Queens Univ, Dept Phys, Kingston, ON K7L 3N6, Canada

来源：

ULTRASONICS | 2002年 / 39卷 / 10期

基金：

加拿大自然科学与工程研究理事会;

关键词：

ultrasonic transducers; sol-gel; piezoelectric; high temperature;

D O I：

10.1016/S0041-624X(02)00390-6

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Thick film broadband ultrasonic transducers (UTs) produced by a sol-gel spray technique and operated below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50100 mum thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250 degreesC. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：675 / 680

页数：6

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