共 10 条
[2]
Design criteria of buckling microbridges
[J].
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV,
1998, 3511
:288-296
[4]
Guckel H., 1992, Journal of Micromechanics and Microengineering, V2, P86, DOI 10.1088/0960-1317/2/2/004
[5]
Jensen BD, 1999, 1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, P206
[7]
LOBER TA, 1988, HILTON HEAD, P92
[8]
Marshall JC, 1996, P SOC PHOTO-OPT INS, V2880, P46, DOI 10.1117/12.250961
[9]
MENG Q, 1993, J MICROELECTROMECHAN, V2, P128