Finite-element simulation of micro-electromechanical systems (MEMS) by strongly coupled electromechanical transducers

被引：19

作者：

Gyimesi, M ^{[1
]}

Avdeev, I

Ostergaard, D

机构：

[1] ANSYS Inc, Canonsburg, PA 15317 USA

[2] Univ Pittsburgh, Dept Mech Engn, Pittsburgh, PA 15261 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2004年 / 40卷 / 02期

关键词：

finite-element methods; micro-electromechanical devices; modeling; transducers;

D O I：

10.1109/TMAG.2004.824592

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper introduces a new methodology for the strongly coupled electrostatic-structural finite-element (FE) simulation of micro-electromechanical systems (MEMS) using a novel distributed electromechanical transducer that is compatible with regular solid and lumped FE. Its application range is as general as the sequentially coupled procedures, but converges more robustly with about an order of magnitude smaller number of iteration. The new transducers apply automatic internal mesh morphing. The morphing allows the mesh density to be different across the domain permitting accurate modeling of fringing effects.

引用

页码：557 / 560

页数：4

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