PRECISION TRACKING MOTION CONTROL OF AN XY MICROPOSITIONING STAGE DRIVEN BY STEPPER MOTOR

被引：0

作者：

Hatem, Tlijani ^{[1
]}

Mohamed, Benrejeb ^{[2
]}

机构：

[1] Inst Super Sci Appliquees & Technol Gafsa ISSAT, Tunis, Tunisia

[2] ENIT, LARA, Tunis, Tunisia

来源：

9TH INTERNATIONAL CONFERENCE ON MODELING & APPLIED SIMULATION | 2010年

关键词：

motion coordination; disturbance observer; XY stage; stepper motor; position control;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper aims to present a motion coordination control approach for two axis XY stage system driven by PM stepper motors. The proposed coordinated control approach is based on a three tier composite control structure feed-forward, feedback PID and force disturbance observer. The contouring performance of a biaxial system is studied for circular trajectories and has been improved by using the proposed control scheme. To demonstrate the effectiveness of the control system design based on analysis of stage dynamics, typical results of system performance experiments micropositionning motion with high precision tracking and accurate positioning was obtained by simulations developed using Matlab and Simulink software.

引用

页码：91 / 96

页数：6

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