Precision machining of microstructures on electroless-plated NiP surface for molding glass components

被引：136

作者：

Yan, Jiwang ^{[1
]}

Oowada, Takashi ^{[1
]}

Zhou, Tianfeng ^{[1
]}

Kuriyagawa, Tsunemoto ^{[1
]}

机构：

[1] Tohoku Univ, Dept Nanomech, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 2009年 / 209卷 / 10期

基金：

日本学术振兴会;

关键词：

Micro-machining; Microstructure array; Glass molding; Optical components;

D O I：

10.1016/j.jmatprotec.2008.12.008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Micro-cutting experiments were conducted on electroless-plated nickel phosphorous (NiP) surfaces to fabricate microstructures such as microgrooves and micropyramid arrays. Burr formation behavior and cutting force characteristics were investigated experimentally and simulated by the finite element method (FEM) under various conditions. A simple two-step cutting process was proposed to improve the surface quality. The machined microstructure arrays were used as molds for hot-press glass molding experiments and good geometrical transferability was confirmed. The results from this study verify that diamond-machined NiP microstructure molds are applicable to glass molding processes for mass production of precision micro-mechanical and optical components. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：4802 / 4808

页数：7

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