Composite structure of piezoelectric quartz resonator

In the paper we present the experimental results and behavior of the composite structure of piezoelectric quartz resonators. The aim of the study is to precise determination of the properties of thin ferroelectric PbTiO3 layer using a dynamical method of measurement. The composite resonator is based on the X90degrees-cut quartz plano-parallel 10 MHz resonator (the diameter of 14,0 mm and thickness of 0,35 mm) with the buffer layer of TiO2, which was realized by magnetron sputtering technology. The thin layer of PbTiO3 was realized by sol-gel technology. The system of Pt electrodes is used for excitation of the composed resonator and for determination of influence of the thin layer. This influence is generated by the mass loading effect, and by piezoelectric contribution of the thin PbTiO3 layer. The behavior of the composed structure is studied using the orientation of quartz resonator X90degrees +/- 5', and also using the non-piezoelectric plate orientation Z90degrees +/- 5'. Many technological problems are discussed in our contribution.