High speed optical phased array using high contrast grating all-pass filters

被引:48
作者
Yang, Weijian [1 ]
Sun, Tianbo [1 ]
Rao, Yi [1 ]
Megens, Mischa [2 ]
Chan, Trevor [2 ]
Yoo, Byung-Wook [1 ]
Horsley, David A. [2 ]
Wu, Ming C. [1 ]
Chang-Hasnain, Connie J. [1 ]
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[2] Univ Calif Davis, Dept Mech & Aerosp Engn, Davis, CA 95616 USA
基金
中国国家自然科学基金;
关键词
Light polarization - Bandpass filters - Diffraction gratings;
D O I
10.1364/OE.22.020038
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report a high speed 8x8 optical phased array using tunable 1550 nm all-pass filters with ultrathin high contrast gratings (HCGs) as the microelectromechanical-actuated top reflectors. The all-pass filter design enables a highly efficient phase tuning (1.7 pi) with a small actuation voltage (10 V) and actuation displacement of the HCG (50 nm). The microelectromechanical HCG structure facilitates a high phase tuning speed >0.5 MHz. Beam steering is experimentally demonstrated with the optical phased array. (C)2014 Optical Society of America
引用
收藏
页码:20038 / 20044
页数:7
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