Epitaxial growth of ferroelectric PbTiO3 thin films by metalorganic chemical vapor deposition

High-quality PbTiO3 thin films have been grown on LaAlO3 and SrTiO3 substrates by metalorganic chemical vapor deposition. The as-deposited films were examined using scanning electron microscopy and x-ray diffraction techniques. The films were mirror-like smooth and fine-grained, the PbTiO3 films on LaAlO3 were epitaxially grown with (001) and (100) double textures and the films on SrTiO3 were near single crystal epitaxy.