X-ray CTR scattering measurements using conventional X-ray source to study semiconductor hetero-interfaces

被引：0

作者：

Maeda, Y. ^{[1
]}

Mizuno, T. ^{[1
]}

Mori, A. ^{[1
]}

Tabuchi, M.

Takeda, Y. ^{[1
]}

机构：

[1] Nagoya Univ, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, VOL 33, NO 3 | 2008年 / 33卷 / 03期

关键词：

X-ray CTR scattering; semiconductor heterostructures; synchrotron radiation; conventional X-ray source;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An X-ray crystal truncation rod (CTR) scattering measurement system was set Lip using X-ray diffractometer that has a conventional X-ray source, i.e., rotating anode X-ray tube. Optical parts such as a collimating-multi layer mirror and an asymmetric Ge(220) monochromator to obtain condensed Cu-K alpha(1) beam and a set of slits to avoid scattered X-rays were installed. An imaging plate was used as a detector. It took 100 minutes for the X-ray CTR scattering measurement using the present system. Analysis of the X-ray CTR scattering spectra which were obtained using the present system showed that almost the same interface structures as those obtained using the SR were represented for the same samples. It suggests that the present measurement system with the conventional X-ray source is useful for the investigation of semiconductor heterostructures.

引用

页码：591 / 594

页数：4

共 50 条

[31] X-ray Beam Induced Current Measurements for Multi-Modal X-ray Microscopy of Solar Cells [J].

Ossig, Christina ;

Nietzold, Tara ;

West, Bradley ;

Bertoni, Mariana ;

Falkenberg, Gerald ;

Schroer, Christian G. ;

Stuckelberger, Michael E. .

JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 2019, (150)

[32] Study of X-ray interference using synchrotron radiation [J].

Jiang, JH ;

Han, Y ;

Wang, ZG ;

Tian, YL ;

Wang, GL ;

Wang, L ;

Zhao, Y ;

Cao, M ;

Li, DC .

HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION, 1998, 22 (08) :763-767

[33] X-ray microscopy [J].

Lider, V. V. .

PHYSICS-USPEKHI, 2017, 60 (02) :187-203

[34] The beamline ID32 at the ESRF for soft X-ray high energy resolution resonant inelastic X-ray scattering and polarisation dependent X-ray absorption spectroscopy [J].

Brookes, N. B. ;

Yakhou-Harris, F. ;

Kummer, K. ;

Fondacaro, A. ;

Cezar, J. C. ;

Betto, D. ;

Velez-Fort, E. ;

Amorese, A. ;

Ghiringhelli, G. ;

Braicovich, L. ;

Barrett, R. ;

Berruyer, G. ;

Cianciosi, F. ;

Eybert, L. ;

Marion, P. ;

van der Linden, P. ;

Zhang, L. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2018, 903 :175-192

[35] An apparatus for in situ x-ray scattering measurements during polymer injection molding [J].

Rendon, Stanley ;

Fang, Jun ;

Burghardt, Wesley R. ;

Bubeck, Robert A. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (04)

[36] Occupation site and distribution of delta-doped Er in InP measured by X-ray CTR scattering [J].

Fujita, K ;

Tsuchiya, J ;

Ichiki, S ;

Hamamatsu, H ;

Matsumoto, N ;

Tabuchi, M ;

Fujiwara, Y ;

Takeda, Y .

APPLIED SURFACE SCIENCE, 1997, 117 :785-789

[37] Project for applications of phase-contrast X-ray imaging to medicine using an X-ray interferometer [J].

Momose, A ;

Yoneyama, A ;

Takeda, T ;

Itai, Y ;

Tu, J ;

Hirano, K .

MEDICAL APPLICATIONS OF PENETRATING RADIATION, 1999, 3770 :23-31

[38] Selection of CVD Diamond Crystals for X-ray Monochromator Applications Using X-ray Diffraction Imaging [J].

Stoupin, Stanislav ;

Krawczyk, Thomas ;

Liu, Zunping ;

Franck, Carl .

CRYSTALS, 2019, 9 (08)

[39] Evaluation of Block Copolymer Structure using Soft X-Ray Scattering [J].

Nakatani, Yusuke ;

Harada, Tetsuo ;

Takano, Atsushi ;

Yamada, Motoyuki ;

Watanabe, Takeo .

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2017, 30 (01) :77-82

[40] X-ray scattering experiments with high-flux X-ray source coupled rapid mixing microchannel device and their potential for high-flux neutron scattering investigations [J].

Jain, R. ;

Petri, M. ;

Kirschbaum, S. ;

Feindt, H. ;

Steltenkamp, S. ;

Sonnenkalb, S. ;

Becker, S. ;

Griesinger, C. ;

Menzel, A. ;

Burg, T. P. ;

Techert, S. .

EUROPEAN PHYSICAL JOURNAL E, 2013, 36 (09)

← 1 2 3 4 5 →