X-ray CTR scattering measurements using conventional X-ray source to study semiconductor hetero-interfaces

被引：0

作者：

Maeda, Y. ^{[1
]}

Mizuno, T. ^{[1
]}

Mori, A. ^{[1
]}

Tabuchi, M.

Takeda, Y. ^{[1
]}

机构：

[1] Nagoya Univ, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, VOL 33, NO 3 | 2008年 / 33卷 / 03期

关键词：

X-ray CTR scattering; semiconductor heterostructures; synchrotron radiation; conventional X-ray source;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An X-ray crystal truncation rod (CTR) scattering measurement system was set Lip using X-ray diffractometer that has a conventional X-ray source, i.e., rotating anode X-ray tube. Optical parts such as a collimating-multi layer mirror and an asymmetric Ge(220) monochromator to obtain condensed Cu-K alpha(1) beam and a set of slits to avoid scattered X-rays were installed. An imaging plate was used as a detector. It took 100 minutes for the X-ray CTR scattering measurement using the present system. Analysis of the X-ray CTR scattering spectra which were obtained using the present system showed that almost the same interface structures as those obtained using the SR were represented for the same samples. It suggests that the present measurement system with the conventional X-ray source is useful for the investigation of semiconductor heterostructures.

引用

页码：591 / 594

页数：4

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