X-ray CTR scattering measurements using conventional X-ray source to study semiconductor hetero-interfaces

An X-ray crystal truncation rod (CTR) scattering measurement system was set Lip using X-ray diffractometer that has a conventional X-ray source, i.e., rotating anode X-ray tube. Optical parts such as a collimating-multi layer mirror and an asymmetric Ge(220) monochromator to obtain condensed Cu-K alpha(1) beam and a set of slits to avoid scattered X-rays were installed. An imaging plate was used as a detector. It took 100 minutes for the X-ray CTR scattering measurement using the present system. Analysis of the X-ray CTR scattering spectra which were obtained using the present system showed that almost the same interface structures as those obtained using the SR were represented for the same samples. It suggests that the present measurement system with the conventional X-ray source is useful for the investigation of semiconductor heterostructures.