Optical, electrical and microstructural properties of nanocomposite Ag/diamond by Ag ion implantation and subsequent annealing

被引：5

作者：

Shen, Yanyan ^{[1
]}

Qi, Ting ^{[1
]}

Qiao, Yu ^{[1
]}

Hei, Hongjun ^{[1
]}

He, Zhiyong ^{[1
]}

Yu, Shengwang ^{[1
]}

机构：

[1] Taiyuan Univ Technol, Res Inst Surface Engn, Taiyuan 030024, Peoples R China

来源：

VACUUM | 2016年 / 123卷

关键词：

Freestanding diamond film; Ag nanoparticles; Ion implantation; Surface morphologies; Carrier mobility; SILVER NANOPARTICLES; DIAMOND; SIO2; EVOLUTION; COPPER;

D O I：

10.1016/j.vacuum.2015.11.001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An optical-grade, free-standing diamond (FSD) film is prepared by home-made microwave plasma chemical vapor deposition reactor at a condition of input power 8 kW and gas pressure 18 kPa. Then, it is implanted with 80 key Ag ions up to a fluence of 5.0 x 1016 ions/cm(2). After implantation, a subsequent annealing in Ar ambient at 500 degrees C is carried out to fabricate Ag nanoparticles (NPs). Grazing incidence x-ray diffraction results clearly showed that Ag NPs with a (111) orientation are effectively formed after 500 degrees C annealing. Results from field emission scanning electron microscope and atomic force microscope observations indicated that Ag NPs could aggregate and grow on the surface of the diamond film during the annealing process. The Hall effects results showed that Ag-implanted FSD film exhibited an enhanced carrier mobility of 34.7 cm(2) V-1 S-1 after 500 degrees C annealing. Moreover, Raman spectroscopy results show that the damages of the Ag-implanted FSD film are essentially a little and the crystallinity is almost recovered by annealing, it is implied that the enhancement in carrier mobility could be attributed to the conductive paths provided by Ag NPs. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：160 / 166

页数：7

共 36 条

[31] Electron field-emission properties of Ag-SiO2 nanocomposite layers [J].

Tsang, WM ;

Stolojan, V ;

Giusca, C ;

Poa, CHP ;

Sealy, B ;

Silva, SRP ;

Wong, SP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (02) :958-961

[32] Subsurface synthesis and characterization of Ag nanoparticles embedded in MgO [J].

Vilayurganapathy, S. ;

Devaraj, A. ;

Colby, R. ;

Pandey, A. ;

Varga, T. ;

Shutthanandan, V. ;

Manandhar, S. ;

El-Khoury, P. Z. ;

Kayani, Asghar ;

Hess, W. P. ;

Thevuthasan, S. .

NANOTECHNOLOGY, 2013, 24 (09)

[33] Synthesis, thermal evolution and optical properties of CuZn alloy nanoparticles in SiO2 sequentially implanted with dual ions [J].

Wang, Jun ;

Zhang, Lihong ;

Zhang, Xiaodong ;

Shen, Yanyan ;

Liu, Changlong .

JOURNAL OF ALLOYS AND COMPOUNDS, 2013, 549 :231-237

[34] The nano-structure and properties of Ag-implanted PET [J].

Yuguang, Wu ;

Tonghe, Zhang ;

Andong, Liu ;

Gu, Zhou .

Surface and Coatings Technology, 2002, 157 (2-3) :262-266

[35] SRIM - The stopping and range of ions in matter (2010) [J].

Ziegler, James F. ;

Ziegler, M. D. ;

Biersack, J. P. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2010, 268 (11-12) :1818-1823

[36] Thermal oxidation of CVD diamond [J].

Zolotukhin, Aleksey ;

Kopylov, Petr G. ;

Ismagilov, Rinat R. ;

Obraztsov, Alexander N. .

← 1 2 3 4 →