共 15 条
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A NEW TECHNOLOGY FOR NEGATIVE-ION DETECTION AND THE RAPID ELECTRON COOLING IN A PULSED HIGH-DENSITY ETCHING PLASMA
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
1995, 34 (10B)
:L1405-L1408
[8]
DETERMINATION OF ELECTRON-ENERGY DISTRIBUTION FUNCTION OF PLASMAS BY DIGITAL PROCESSING FROM LANGMUIR PROBE CHARACTERISTIC
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1990, 29 (10)
:2139-2144
[9]
DETECTION OF ELECTRON-ENERGY DISTRIBUTION FUNCTION BY FINITE IMPULSE-RESPONSE FILTER
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1991, 30 (08)
:1877-1881