Effects of nitrogen on the growth and optical properties of ZnO thin films grown by pulsed laser deposition

被引:8
作者
Cui, J. B. [1 ]
Thomas, M. A. [1 ]
Soo, Y. C. [1 ]
Kandel, H. [1 ]
Chen, T. P. [1 ]
机构
[1] Univ Arkansas, Dept Phys & Astron, Little Rock, AR 72204 USA
关键词
P-TYPE ZNO; ACCEPTOR PAIR LUMINESCENCE; ELECTRICAL-PROPERTIES; TEMPERATURE; TRANSITIONS; PRESSURE; TARGET; PLD; SI;
D O I
10.1088/0022-3727/42/15/155407
中图分类号
O59 [应用物理学];
学科分类号
摘要
ZnO thin films were grown using pulsed laser deposition by ablating a Zn target in various mixtures of O-2 and N-2. The presence of N-2 during deposition was found to affect the growth of the ZnO thin films and their optical properties. Small N-2 concentrations during growth led to strong acceptor-related photoluminescence (PL), while larger concentrations affected both the intensity and temperature dependence of the emission peaks. In addition, the PL properties of the annealed ZnO thin films are associated with the N-2 concentration during their growth. The possible role of nitrogen in ZnO growth and annealing is discussed.
引用
收藏
页数:7
相关论文
共 46 条
[1]   Reactive pulsed laser deposition of zinc oxide thin films [J].
Bílková, P ;
Mitu, B ;
Marotta, V ;
Mattei, G ;
Orlando, S ;
Santagata, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6) :1061-1065
[2]   Initial preferred growth in zinc oxide thin films on Si and amorphous substrates by a pulsed laser deposition [J].
Choi, JH ;
Tabata, H ;
Kawai, T .
JOURNAL OF CRYSTAL GROWTH, 2001, 226 (04) :493-500
[3]   Variable temperature photoluminescence of pulsed laser deposited ZnO thin films [J].
Cui, J. B. ;
Soo, Y. C. ;
Thomas, A. ;
Kandel, H. ;
Chen, T. P. ;
Daghlian, C. P. .
JOURNAL OF APPLIED PHYSICS, 2008, 104 (04)
[4]   Thermal modification of magnetism in cobalt-doped ZnO nanowires grown at low temperatures [J].
Cui, Jingbiao ;
Gibson, Ursula .
PHYSICAL REVIEW B, 2006, 74 (04)
[5]   Microstructure and photoluminescence properties of ZnO thin films grown by PLD on Si(111) substrates [J].
Fan, XM ;
Lian, JS ;
Guo, ZX ;
Lu, HJ .
APPLIED SURFACE SCIENCE, 2005, 239 (02) :176-181
[6]   Investigation of laser-ablated ZnO thin films grown with Zn metal target:: A structural study [J].
Fouchet, A ;
Prellier, W ;
Mercey, B ;
Méchin, L ;
Kulkarni, VN ;
Venkatesan, T .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (06) :3228-3233
[7]   Photoluminescent and structural properties of precipitated ZnO fine particles [J].
Gomi, M ;
Oohira, N ;
Ozaki, K ;
Koyano, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (2A) :481-485
[8]   Pulsed laser reactive deposition of p-type ZnO film enhanced by an electron cyclotron resonance source [J].
Guo, XL ;
Tabata, H ;
Kawai, T .
JOURNAL OF CRYSTAL GROWTH, 2001, 223 (1-2) :135-139
[9]   Study of the photoluminescence of phosphorus-doped p-type ZnO thin films grown by radio-frequency magnetron sputtering -: art. no. 151917 [J].
Hwang, DK ;
Kim, HS ;
Lim, JH ;
Oh, JY ;
Yang, JH ;
Park, SJ ;
Kim, KK ;
Look, DC ;
Park, YS .
APPLIED PHYSICS LETTERS, 2005, 86 (15) :1-3
[10]   Native point defects in ZnO [J].
Janotti, Anderson ;
Van de Walle, Chris G. .
PHYSICAL REVIEW B, 2007, 76 (16)