Preparation of non-spherical particles by shell-shield etching for near-field nanopatterning

被引:4
作者
Ye, Jian [1 ]
Liesbet, Lagae [2 ,3 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Biomed Engn, Shanghai Engn Res Ctr Med Device & Technol Med X, Shanghai 200030, Peoples R China
[2] IMEC VZW, B-3001 Louvain, Belgium
[3] Katholieke Univ Leuven, Dept Phys & Astron, B-3001 Louvain, Belgium
基金
上海市自然科学基金;
关键词
non-spherical particle; near-field nanopatterning; finite difference time domain (FDTD); ENHANCED RAMAN-SCATTERING; NANOSPHERE LITHOGRAPHY; SURFACE; FABRICATION; FLOW; FILM; MICROPARTICLES; MONODISPERSE; SPHERES;
D O I
10.1088/0957-4484/25/27/275303
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The shape of polymer particles plays an important role in determining their function. In this paper, we describe a simple and unconventional method called shell-shield etching (SSE) that allows us to prepare freestanding submicrometer- or micrometer-sized polymer particles with various shapes. By precisely varying the time of ultraviolet ozone treatment under the partial shielding effect of the silica shell, we controllably reshape polymer spheres into symmetry-reduced polymer peaches, mushrooms, bowls, and plates. Finite difference time domain simulations indicate that the non-spherical particles obtained from the SSE method might have potential for near-field nanopatterning applications.
引用
收藏
页数:8
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