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- [23] Preliminary evaluation of the vibration environment within JS']JSC Chamber A using a simultaneous phase-shifting interferometer SPACE TELESCOPES AND INSTRUMENTATION I: OPTICAL, INFRARED, AND MILLIMETER, PTS 1 AND 2, 2006, 6265
- [27] Three-dimensional microscopy and measurement by phase-shifting digital holography FIFTH INTERNATIONAL CONFERENCE ON CORRELATION OPTICS, 2001, 4607 : 153 - 160
- [28] Compact instantaneous phase-shifting Sagnac interferometer for nanoscale tilt measurement OPTICS AND LASER TECHNOLOGY, 2022, 153
- [29] Design of the phase-shifting algorithm for flatness measurement of a mask blank glass METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII, 2014, 9050