Preparation of TEM samples of metal-oxide interface by the focused ion beam technique

被引:18
作者
Abolhassani, S. [1 ]
Gasser, Philippe
机构
[1] Paul Scherrer Inst, Lab Mat Behav, CH-5232 Villigen, Switzerland
[2] EMPA, Swiss Fed Inst Mat Testing & Res, CH-8600 Dubendorf, Switzerland
来源
JOURNAL OF MICROSCOPY-OXFORD | 2006年 / 223卷
关键词
energy dispersive X-ray spectrometer (EDS) analysis by TEM; focused ion beam (FIB); irradiated Zircaloy-4; 'Lift-out'; metal-oxide interface; TEM; TEM specimen preparation;
D O I
10.1111/j.1365-2818.2006.01599.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
This paper describes a procedure to prepare metal-oxide interfaces for transmission electron microscopy by the focused ion beam technique. The advantage of this procedure is to allow the observation of metal-oxide interfaces of irradiated samples with a homogeneous thickness without the need to have an instrument inside laboratories that are specialized for the manipulation of irradiated materials. A transmission electron microscopy sample is prepared by this method and analysed.
引用
收藏
页码:73 / 82
页数:10
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