Ion beam sputtering induced ripple formation in thin metal films

被引:74
作者
Karmakar, P [1 ]
Ghose, D [1 ]
机构
[1] Saha Inst Nucl Phys, Kolkata 700064, W Bengal, India
关键词
polycrystalline thin films; metallic films; sputtering; surface structure; morphology; roughness; and topography; atomic force microscopy;
D O I
10.1016/j.susc.2004.02.020
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have observed the formation of ripples in a number of thin metal films, e.g. Au, Pt, Ag, Cu and Co under Ar+ ion beam sputtering at grazing incidence. The structures are found to be quite stable under ambient conditions. The results show that the ripple formation in polycrystalline metallic films relies on the erosion-induced surface instability similar to that in amorphous materials. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:L101 / L106
页数:6
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