Linking up various detection systems for dimensional measurements in the micro- and nanorange with the Nanomeasuring Machine

The proceeding miniaturization of components in the semiconductor and MEMS industries raises the demands on the accuracy of the measuring instruments applied in quality assurance systems. Special attention requires the comparability of the measurement results and also their traceability to the length unit. In this paper a measuring instrument is introduced based on a high-resolution positioning system named as Nanomeasuring Machine and a set of four tactile and optical detection systems. This instrument can be adapted to different measurement tasks of the field of dimensional metrology in the micro and nano range. A selection of calibration results illustrates the measurement capabilities of the instrument.