Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO2 Structure

被引：2

作者：

Polyakov, Dmitry ^{[1
]}

Skvortsov, Albert ^{[1
]}

Veiko, Vadim ^{[1
]}

机构：

[1] ITMO Univ, St Petersburg, Russia

来源：

JOURNAL OF LASER MICRO NANOENGINEERING | 2015年 / 10卷 / 03期

关键词：

wave-like microstructures; Si/SiO2; structure; ytterbium fiber laser; FEMTOSECOND LASER; SILICON;

D O I：

10.2961/jlmn.2015.03.0006

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The regularities of microrelief formation on the surface of Si/SiO2 structure under the action of pulsed fiber laser radiation with intensity lower than SiO2 damage threshold are studied. Obtained surface morphology modification accompanied with changes in capacitance-voltage characteristics of modified area.

引用

页码：269 / 273

页数：5

共 15 条

[1] Melting and surface deformation in pulsed laser surface micromodification of Ni-P disks [J].