共 50 条
- [23] Modeling and Simulation of Atomic Layer Deposition 2019 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES (SISPAD 2019), 2019, : 323 - 326
- [29] Supported Single Fe Atoms Prepared via Atomic Layer Deposition for Catalytic Reactions ACS APPLIED NANO MATERIALS, 2020, 3 (03): : 2867 - 2874