共 45 条
[31]
Three-dimensional microfluidic mixers using ion beam lithography and micromachining
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2010, 28 (06)
:C6I1-C6I6
[32]
Rudneva M., 2012, MAT RES SOC S P, V1455
[33]
Rue C, 2007, ISTFA 2007, P312
[34]
Selinger R.L., 1982, US Patent, Patent No. [4,310,743, 4310743]
[35]
Sub-10-nm nanolithography with a scanning helium beam
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2009, 27 (04)
:L18-L20
[36]
Probe current distribution characterization technique for focused ion beam
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2012, 30 (06)
[37]
Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2011, 29 (06)
[38]
Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2010, 28 (06)
:C6F15-C6F21
[40]
Gas-assisted focused electron beam and ion beam processing and fabrication
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2008, 26 (04)
:1197-1276